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- TEAM SOLUTIONS, INC.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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High-Power Density
Apex
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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Remote Plasma Sources
Equip your manufacturing and abatement processes with high functionality and exceptional reliability. Customize your chemistry. Expand your operating range. Deliver higher process rates. Advanced Energy’s remote plasma sources offer sophisticated options in streamlined designs.
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Generators
Sine Signal Generator
The Software Sine generator allows to produce sine and constant voltage signals at the DAC output.
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Generators
Frequency-Modulated Signal Generator
The Software Signal generator allows to produce frequency-modulated signals at the DAC output.
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Generators
Pulse Signal Generator
The Software Signal generator allows to produce pulse signals with various pulse ratio and frequency at the DAC output.
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Plasma Etcher / Asher
PA-3000-A ETCHER
Process chamber with plasma view window and full access hinged door. RF hot process shelves with opposing ground electrodes. Throttle valve. Capacitance manometer. Internal pumping system with option for Fomblin filled chemical series mechanical pump. Flow control electronics and cabinet. Up to four mass flow control assemblies can be incorporated into our system. RF matching network and 600 watt maximum power supply. Fully enclosed cabinet. Custom internal fixturing to accommodate specific substrate shapes and sizes. Plasma gas selection for optimal performance.
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Pattern Generators
PG311N Series
The MicroImage PG311 series of pattern generators are for applications to display custom designed patterns on screen. The PG311 units will overlay the pattern or patterns on top of the video signal provided to the input of the device. The PG311 can be factory programmed with one unique pattern.
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Signal Generators
2, 4 and 8 Channel Arbitrary Waveform Generator and Pulse Pattern Generator solutions are ideal choice in automated test benches, for physics experiments, semiconductor tests, analog and digital debugging.
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Signal Generators
Precision Test Systems manufacturers various signal generators. We can also supply other manufacturers or used signal generators. Our main signal generators are listed below.
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Pulse Generators
An electronic circuit or a piece of electronic test equipment used to generate rectangular pulses.
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Comb Generators
Keysight comb generators provide excellent phase and amplitude flatness making them ideal for use in phase calibration applications. A customer selectable USB-controlled frequency divider which allows for broad range of input signal frequencies from 10 MHz to 67 GHz and small minimum tone spacing of 10 MHz, makes Keysight comb generators suitable for characterizing non-linear devices.
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Signal Generators
SSG5000X Series
SIGLENT’S SSG5000X series of signal generators can generate analog and vector signals, and have a frequency range of 9 kHz to 4 GHz/6 GHz. They feature the industry-leading performance in phase noise, spectral purity, bandwidth, EVM, output power. The internal IQ modulation generator and waveform playback function make it easy to create even the most complex signal types. They also cover the most important RF band for digital wireless communications and include standard waveform files. The SIGLENT SSG5000X are powerful and cost effective sources that are ideal for R&D, education, and manufacturing.
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Function generators
Instrumentation for laboratories and technical schools, with digital control.
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DC Voltage/Current Generators
Pulse generation/measurement with basic accuracy of ±0.02% and the minimum pulse width of 50μs, maximum output of 6V/5A
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VITC Readers & Generators
Analog composite video and generates standard SMPTE VITC time code and inserts it into the first few lines of active video rather than into the vertical interval where normal VITC is located. This allows the VITC time code to be recorded on various digital video recorders that record the picture content but do not record the actual vertical interval portion of the video signal and in this way allows you to use these digital video recorders to record high quality video and VITC time code.
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Multifunctional Generators
The multifunctional test simulators from Hilo- Test are perfect basic equipment for each EMC test laboratory. These combination devices offer the most versatile and at the same time economical solution for full-compliant immunity tests. Below you will find all the "All-In-One" - test generators for various purposes with a wide range of accessories.
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ICP Plasma System
The AXIC IsoLok® Inductively Coupled Plasma (ICP) Load-Locked Processing System from AXIC, Inc. defines a new concept in Deep Reactive Ion Etch (DRIE) and low temperature-low damage Plasma Enhanced Chemical Vapor Deposition (ICP-PECVD) plasma processing. The system is based on a modular design starting with a universal chamber and cabinet unit with ICP etch or deposition bottom electrodes available for easy installation into the chamber unit combined with a load-lock. We are confident you will find the ease of use, variety of plasma processes, serviceability and attractive pricing unsurpassed by any other plasma product in the market.
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Online Tone Generators
Output of our tone generators will be downloaded straight to your computer as a .wav file. In other words, our waveform generators will generate high quality sound files, but won't play them online, ensuring the highest sound quality one can obtain on a computer. Single Frequency: Sine Tone Generator, Square Tone Generator, Sawtooth Tone Generator, Triangle Tone Generator. Dual Frequency: Dual Sine Tone Generator (IMD Test). Variable Frequency (sweep) Audio Signal Generators: Sweep Tone (Chirp) Generator.
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Waveform Generators
Whether you need a simple sine wave generator for your classroom or you are working with complex applications and arbitrary waves the RIGOL portfolio of waveform generators has the solution to meet your performance needs. With industry leading pricing the RIGOL family of waveform generators provides unmatched customer value
