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- TEAM SOLUTIONS, INC.
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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High-Power Density
Apex
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Generators
Sinusoidal Vibration
Software application Sinusoidal vibration is used for testing products resistance to vibration impact at different frequencies and ranges. It is included into software complex ZETLAB VIBRO, supplied together with VCS ZET017-U. The program is available in VCS menu of ZETLAB control panel.
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Plasma Process Monitors
Plasma process monitors to monitor plasma emissions during semiconductor manufacturing processes such as etching, sputtering and CVD.
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Generators
Classical Shock
Software Classical shock is used for testing specimen resistance to shock impact. As the Software Classical shock is activated, at the output of shaker control system ZET 017-U there is formed a signal with pre-set parameters. Types of signals generated:
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Generators
Radio Pulse Signal Generator
The Software Signal generator allows to to produce radio pulse signals of various pulse rate and frequency at the DAC output.
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Signal Generators
Whether the BPSG generators with their precisely generated RF signals for testing EMC shielding and EMI/RFI measurements, or the brand new SPECTRAN V6 VSG vector signal generators with a frequency range of 10 MHz - 6 GHz and a large number of modulation types, the Aaronia signal generators impress with their quality and price.
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Signal Generators
NF‘s function generators have been used in many applications, since NF produced the first Japan-built function generator in 1959.A function generator is general-purpose test equipment used to generate various waveforms and to execute trigger, sweep and gate oscillation.
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Generators and Sources
For general purpose standalone applications or as core components in a high speed test and measurement system, Yokogawa sources and signal generators are highly accurate and functional. The integration of source and measurement into a single unit greatly simplifies the test process. Semiconductor devices, sensors, displays or batteries etc can therefore be quickly and easily characterized.
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Function Generators
Waveform : Sine, Triangle, Square, Pulse, Sawtooth, Ramp 0.2Hz-150MHz EXT Frequency Counter(Option : 1:6 GHz or 2.7GHz) Self made insert ASIC Function : Total, RPM, Period, LPF, COUPL(AC/DC), ATT(X10) Fast,High-Resolution, 8Digits LED display Internal or External AM,FM Modulation Internal or External Burst and Linear Sweep Countrol from 1 : 1 to 100:1 TTL/CMOS Leveled Square Wave Output Maximum Attenuation of 20 dB cna be obtained Output impedance : 50 INPUT SENSITMTYKHz Range : 100mVms, MHz Range : 300mVms SWEEP WIDTH : Variable from 1:1 -100:1 RATE : 0.5Hz - 50Hz(20ms-2s) INTERNAL : Linear Bilt-in 5digits Green LED display
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Noise Generators
GShM Series
*Operating temperature: +15...+25°C*Detection error for excessive relative noise temperature: +/-0.4 dB*Power consumption — <35 mA
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Surge Generators
K&S Engineering and Scientific Ltd
The instrument is fully enclosed in a robust all steel enclosure mounted on castors and fitted with carrying handles. The control panel forms the top of the case, it is finished in high gloss light blue stoving with cutter engraved labelling, and is protected by a detachable lid. The EHT outlet is of a recessed type designed to prevent accidental contact with high voltages. Surge repetition is electronically controlled from 0 to 10 seconds, a single surge or a train of pulses can be selected by a panel mounted switch. Automatic discharge of the instrument is achieved by a gravity operated switch which is released on switching 'OFF' the instrument or on disconnecting the supply.
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Function Generators
GAOTek offers a selection of function generators that meet today’s industry needs and offers these function generators for sale to the United States, Canada and Globally.
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ESD Generators
The ESD Simulators ESD suitable for performing EMC tests of systems and equipment according to the standards IEC / EN 61000-4-2 and ISO / TR 10605. It can far beyond the standard boundaries higher test levels are adjusted. Depending on the device under test and the test setup are two test method shall be: Air discharge (AIR) and contact discharge (CON).
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Gas Generators
Parker provides on-site, on-demand gas supply solutions, and offers a comprehensive range of analytical and industrial gas generation systems. Our nitrogen gas generators for industrial applications and analytical lab gas generators support laboratory equipment and instruments. All Parker gas generators provide simple “plug and play” installation, efficiently enabling a continuous or on-demand supply of consistently pure gas.
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Function Generators
Advanced Energy's Trek function generator and amplifier systems can be used in a broad range of R&D and production applications. Features include our exclusive instrument control and interface for remote operation.
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Plasma Emission Controller
RU-1000
The optical technology developed by HORIBA and the gas control technology offered by HORIBA STEC have been combined to make further advances in plasma control technology. The plasma emission controller RU-100 offers; faster deposition by controlling the transition region, optimized distribution in a large-area, high-capacity chamber, plasma stabilization in a long sputtering process (stable deposition), and mixture optimization of compounds for reactive sputtering.
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Generators
GE is bringing generator technology and performance to the next level. We engineer and build our generators to meet the demanding specifications that keep you on the leading edge of efficient, reliable output. Our equipment installs quickly, integrates easily, operates reliably and delivers more power. With over 12,000 generators shipped since 1901, GE understands your challenges, and offers a complete range of configurations and cooling technologies to meet industry needs.
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Signal Generators
SSG3000X Series
SIGLENT’S SSG3000X series of signal generators have a frequency range of 9 kHz to 2.1 GHz/3.2 GHz. They provide normal analog modulation such as AM, FM, and PM. They also provide pulse modulation and pulse train generator. In addition, when used with baseband generator such as SDG6000X, They can generate IQ modulated signals. With their high accuracy and pure outputs, the SSG3000X series is the right choice for R&D, education, and manufacturing.
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Waveform Generators
Waveform Generators produce large, complex analog waveforms in a sequential manner or using real-time streaming. These instruments are ideal for applications in scientific research and testing of consumer electronics, automotive, and aerospace/defense.
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Remote Plasma Sources
Equip your manufacturing and abatement processes with high functionality and exceptional reliability. Customize your chemistry. Expand your operating range. Deliver higher process rates. Advanced Energy’s remote plasma sources offer sophisticated options in streamlined designs.
